Scientific CMOS (sCMOS) センサは、高感度、高速読み出し、低ノイズを同時に実現し、EM-CCDのようなエクセスノイズを発生させない最新のイメージング技術です。高感度と低ノイズを両立することで、低照度撮影時の高いS/N比を実現しています。このイメージセンサは、フォトダイオードと電荷を電圧に変換するアンプで構成された画素を持ちます。スイッチを1つずつオンにして各画素の電圧を出力し、オンチップのカラムアンプとA/Dで水平ラインごとのデータを並列かつ同時に読み出します。これにより、読み出しノイズを非常に低く抑えながら、非常に高速な読み出しを実現しています。浜松ホトニクスのsCMOSカメラは、画素ごとのゲインのばらつきが少なく、高速フレームレートで、かつてない感度 (高QE、低ノイズであるため) を実現するように設計されています。
以下にsCMOSカメラの人気機種を記載します。
相対SNRに対するカメラ仕様の影響
読み出しノイズは感度を定義するために使用される主要なカメラ仕様です。Gen II sCMOSの性能では、量子効率、読み出しノイズ、エクセスノイズのすべてがSNRにどのように影響するかを理解することが極めて重要です。上図の紫色の線は、量子効率が100%、読み出しノイズが0のカメラ (以降Perfectカメラ) の相対的なSNRを表しています。この線の上の数字は、一連の信号強度におけるSNR比を示し、SNR = 1は各曲線上の星印で示されています。Perfectカメラであるため、これらのSNRは光ショットノイズによってのみ制限されます。このグラフに記載されている3つの実際のカメラについて、各曲線の領域を表すバーが下にあります。 (A) の領域で示される最低光量下では、読み出しノイズが相対的なSNR計算を支配し (S < Nr2/(QE*Fn2) ) 、ショットノイズ支配領域へのクロスオーバーはこの低光量領域の上限となります (三角形で示される地点、ORCA-Flash4.0の場合は2.3フォトン、CCDは50フォトン) 。 (B) 領域は中間領域で、読み出しノイズ、eQE (effective QE = 実効的なQE) 、エクセスノイズの全てが相対的なSNRに寄与します。この領域の上限を、そのカメラの最大相対S/N比の95 %となる点 (矢印、ORCA-Flash4.0は20フォトン、CCDは550フォトン) と定義します。 (C) 領域は、eQEが唯一の重要なカメラパラメータである高照度領域です (SNR損失は縦括弧で示されています) 。この3つの領域は、ORCA-Flash4.0とインターライントランスファCCDの場合、エクセスノイズ=1で簡単に定義できます。EM-CCDでは、この曲線は平坦になります。EM-CCDのカーブは、非常に低い光量を除いて、Perfectカメラの形状をほぼ正確に反映していますが、SNRはPerfectカメラの値の0.68に減少しています。このように、EM-CCDは読み出しノイズが低く、QEが高いにもかかわらず、エクセスノイズ = 1.4の影響を大きく受け、EM-CCDのすべての入力光量領域において、eQEが支配的であることが明らかです。
Gen II sCMOSカメラ ORCA-Flash4.0とGen I sCMOSカメラとの画像均一性の比較です。sCMOSは、画像内のすべてのピクセルから均一な応答を確保するために、高度なセンサーとカメラ設計が必要です。GENⅡ sCMOSカメラ ORCA-Flash4.0は、画像の均一性が非常に優れています。一方で、の Gen I sCMOSカメラでは縦縞が見られます。低照度ではこのようなパターンは現れないため、他の光量でこのようなストライプを探すことが重要です。
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